HOME > Presentation > Detail
ハロゲン系プラズマ＋シリコン表面系における吸着種の電子付着脱離
(Spontaneous desorption of chemisorbed ﾐSi(halgen)3 on Si(111) by electron(s) adsorption)
春季応用物理学会. March 27, 2002-March 30, 2002.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-18 02:31:21 +0900 Updated at: 2017-07-10 18:22:16 +0900