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コンビナトリアル手法による3元系非晶質絶縁膜材料探索とその課題
(Amorphous stability of three component composition spread thin film)
第63回応用物理学会学術講演会. September 24, 2002-September 27, 2002.
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Created at: 2017-02-18 02:50:48 +0900 Updated at: 2017-07-10 18:31:12 +0900