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Dynamic Film-making Processes Using High-flux Ion Beams
(高粒子束イオンビームを用いたダイナミックな薄膜生成プロセッシング)
4th Int. Conf. on Modification of Properties of Surface Layers o. August 27, 2001-August 30, 2001. Invited
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 10:54:50 +0900 Updated at: 2024-03-05 11:39:22 +0900