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高い物理的・機械的特性を示す TiHfSiN/NbN/Al2O3 多層膜の形成
(Formation of Multilayered TiHfSiN/NbN/Al2O3 Coatings with High Physical and Mechanical Properties)

A.D. Pogrebnjak, M.S. Prozorova, M.G. Kovalyova, O.V. Kolisnichenko, V.M. Beresnev, 大吉 啓司, 武田 良彦, A.S. Kaverina, A.P. Shypylenko, J. Partyka.
the IX International Conference ION 2012. 2012.

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

    Created at: 2017-01-08 04:43:44 +0900Updated at: 2017-07-10 21:43:13 +0900

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