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イオン注入Si中の水素(重水素)分子とSi-H(Si-D)結合中心の生成過程
(Formation Process of H2(D2) molecules and Si-H(Si-D) centers in Ion Implanted Si)
2002秋季第63回応用物理学会学術講演会. September 24, 2002-September 27, 2002.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-18 02:57:16 +0900 Updated at: 2017-07-10 18:34:07 +0900