HOME > Presentation > Detail
新規液体原料（Zn(Cppm)2）によるZnO薄膜の原子層堆積
(Atomic layer deposition of ZnO thin films using a novel liquid precursor, Zn(Cppm)2)
2022年 第83回応用物理学会秋季学術講演会. September 20, 2022-September 23, 2022.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2023-04-10 17:34:47 +0900 Updated at: 2023-04-10 17:34:47 +0900