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磁気浮上搬送を用いた極高真空一貫プロセスの開発
(XHV Integrated process with magnetic levitation transports)
4th International Symposium on Magnetic Suspension Technology. October 30, 1997-November 01, 1997.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-18 01:21:15 +0900 Updated at: 2017-07-10 17:45:01 +0900