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Ti-Ni合金スパッタ膜の応力－ひずみ曲線に及ぼす膜厚の効果
(Effect of film thickness on stress-strain curve of sputter-deposited Ti-Ni thin films.)
日本金属学会 1998年秋期大会. September 28, 1998-September 30, 1998.
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Created at: 2017-02-18 01:32:37 +0900 Updated at: 2018-05-21 18:21:51 +0900