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大電流負イオン注入によるCuナノ結晶の生成
(Formation of Cu Nano-crystals by high-current Cu-Ion implantation)

岸本 直樹, 武田 良彦, 李致圭, 梅田直樹, 斎藤鉄哉, 李致圭, 梅田直樹, 斎藤鉄哉.
応用物理学会学術講演会. October 02, 1997-October 05, 1997.

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    Created at: 2017-02-18 01:20:33 +0900 Updated at: 2017-07-10 17:44:40 +0900

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