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Relation between Ozone-Oxidation and Stress Evolution on H/Si Surface
(H/Si 表面のオゾン酸化と表面応力の関係)
Asia-Pacific Surface & Interface Analysis Conference(APSIAC'02). October 01, 2002-October 04, 2002.
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Created at: 2017-02-18 02:58:46 +0900 Updated at: 2017-07-10 18:34:52 +0900