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コンビナトリアル手法を用いた金属電極材料及びHigh-k絶縁膜の界面特性制御
(Interface Properties of Metal Electrodes and High-k Dielectric Films Using a Combinatorial Technique)
2006年秋季 第67回応用物理学会学術講演会. August 29, 2006-September 01, 2006. Invited
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 11:19:36 +0900 Updated at: 2024-03-05 11:41:12 +0900