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Thermal recovery of damage in SiO2/Si structure implanted with copper negative-ions
(銅負イオン照射されたSiO2/Si構造のダメージの熱的回復過程)
第13回日本MRS学術シンポジウム. December 20, 2001-December 21, 2001.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-18 02:28:26 +0900 Updated at: 2023-04-09 15:22:46 +0900