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PLD法により作製したHfO2-Al2O3縦方向組成傾斜膜の作製と評価
(Characterization of HfO2-Al2O3 with which composition inclined prepared by PLD)
第50回応用物理学関連連合講演会. March 27, 2003-March 30, 2003.
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Created at: 2017-02-18 03:13:27 +0900 Updated at: 2018-05-30 19:03:22 +0900