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レーザーCVDSiC膜の組織と光学特性
(Microstructure and Optical Property of Lser-CVD SiC Film)
日本金属学会１９９４年秋期大会. October 08, 1994-October 10, 1994.
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Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-18 00:53:02 +0900 Updated at: 2017-07-10 17:30:17 +0900