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Combinatorial Synthesis Approarch for Optimizing Oxide/Si Interface for the Future LSI
(次世代集積回路のためのコンビナトリアル手法を使った酸化物/Si界面の最適化と材料合成)
2001 MRS Fall Meeting. November 26, 2001-November 30, 2001. Invited
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-09-05 11:09:55 +0900 Updated at: 2024-03-05 11:39:27 +0900