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レーザープラズマ・同期ＣＶＤによる機能性ＢＮ薄膜
(Functional BN films fabricated by synchronous CVD)
第20回プラズマ材料科学シンポジウム. June 21, 2007-June 22, 2007.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 10:57:32 +0900 Updated at: 2017-07-10 19:56:46 +0900