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HfO2-Y2O3-Al2O3 3成分コンポジションスプレッド薄膜における非晶質安定性の組成依存
(Amorphous stability of HfO2-Y2O3-Al2O3 ternary thin film)
「極薄シリコン酸化膜の形成・評価・信頼性」研究会. January 24, 2003-January 25, 2003.
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Created at: 2017-02-18 03:06:29 +0900 Updated at: 2017-07-10 18:38:32 +0900