HOME > Presentation > Detail
バイアススパッタによるYSZ薄膜の面内配向制御.
(Control of In-Plane Texturing of YSZ Thin Films by Bias-Sputtering.)
応用物理学会. September 27, 1993-September 30, 1993.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-18 00:43:01 +0900 Updated at: 2017-07-10 17:24:38 +0900