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CVDダイヤモンドモンド成膜におけるELO法の有効性の検討
(Effectiveness of Epitaxial Lateral Overgrowth on CVD Diamond Growth)
第53回応用物理学会学術講演会. March 22, 2006-March 26, 2006.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 04:23:56 +0900 Updated at: 2017-07-10 19:35:15 +0900