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AuthorTestushi Hasegawa, TERAJI, Tokuyuki, Toshimichi Ito.
TitleCVDダイヤモンドモンド成膜におけるELO法の有効性の検討
(Effectiveness of Epitaxial Lateral Overgrowth on CVD Diamond Growth)
Event name第53回応用物理学会学術講演会
Year of publication2006
LanguageJapanese

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