CHARACTERIZATION OF LEAKAGE BEHAVIORS OF HIGH-K GATE STACKS BY ELECTRON-BEAM-INDUCED CURRENT
2008 International Reliability Physics Symposium. 2008.
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Materials Data Repository (MDR)上の本文・データセット
作成時刻: 2022-09-05 12:01:47 +0900更新時刻: 2022-09-05 12:01:47 +0900