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Initial Plasma Oxidation of Silicon Studied by Real-time Ellipsometry
(実時間エリプソメトリーによるシリコンの初期酸化)
International Symposium Polarized Analysis and Application to De. June 12, 1996-June 14, 1996.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-18 01:05:54 +0900 Updated at: 2017-07-10 17:36:57 +0900