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著者名KOBATA, Masaaki, PIS, Igor, IWAI, Hideo, YAMAZUI Hiromichi, TAKAHASHI Hiroaki, SUZUKI Mineharu, NOHIRA Hiroshi, MATSUDA Hiroyuki, DAIMON Hiroshi, KOBAYASHI, Keisuke.
タイトルDevelopment of Laboratory Hard X-ray Photoelectron Spectroscopy system and Application to Measurement of SiO2 Thickness on Si(001)
会議名VUVX 2010
発表年2010
言語English

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