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(Development of Laboratory Hard X-ray Photoelectron Spectroscopy system and Application to Measurement of SiO2 Thickness on Si(001))

小畠 雅明, ピス イゴール, 岩井 秀夫, 山瑞拡路, 高橋宏晃, 鈴木峰晴, 野平博司, 松田博之, 大門寛, 小林 啓介.
VUVX 2010. 2010.

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Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at: 2017-01-08 04:44:15 +0900Updated at: 2017-07-10 20:47:45 +0900

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