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VLS法によるSiナノワイヤの成長方向のシランガス分圧依存性評価
(SiH4 Partial Pressure Dependence of Si Nanowire Orientation by VLS Method)
The 80th Autumn Meeting 2019. 2019.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2020-01-07 03:00:30 +0900Updated at: 2020-01-07 03:00:30 +0900