HOME > 口頭発表 > 書誌詳細Fabrication of defect-free and diameter-controlled silicon nanodisks for future quantum devices by using neutral beam etchingTakeshi Hashimoto, Tomohiro Kubota, Chi-Hsien Huang, 竹口 雅樹, Kensuke Nishioka, Yukiharu Uraoka, Takashi Fuyuki, Ichiro Yamashita, Seiji Samukawa. AVS 54th International Symposium & Exhibition. 2007.NIMS著者竹口 雅樹Materials Data Repository (MDR)上の本文・データセット作成時刻 :2017-02-14 11:09:37 +0900 更新時刻 :2017-07-10 20:11:13 +0900