Fabrication of defect-free and diameter-controlled silicon nanodisks for future quantum devices by using neutral beam etching

Takeshi Hashimoto, Tomohiro Kubota, Chi-Hsien Huang, 竹口雅樹, Kensuke Nishioka, Yukiharu Uraoka, Takashi Fuyuki, Ichiro Yamashita, Seiji Samukawa.

AVS 54th International Symposium & Exhibition. 2007年10月14日-2007年10月19日.