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Fabrication of defect-free and diameter-controlled silicon nanodisks for future quantum devices by using neutral beam etching

Takeshi Hashimoto, Tomohiro Kubota, Chi-Hsien Huang, 竹口 雅樹, Kensuke Nishioka, Yukiharu Uraoka, Takashi Fuyuki, Ichiro Yamashita, Seiji Samukawa.
AVS 54th International Symposium & Exhibition. 2007.

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Materials Data Repository (MDR)上の本文・データセット


    作成時刻 :2017-02-14 11:09:37 +0900 更新時刻 :2017-07-10 20:11:13 +0900

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