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Fabrication of defect-free and diameter-controlled silicon nanodisks for future quantum devices by using neutral beam etching
AVS 54th International Symposium & Exhibition. 2007.
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Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 11:09:37 +0900Updated at: 2017-07-10 20:11:13 +0900