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コンビナトリアル手法による酸化物/Si界面の評価
(Combinatorial Approch for Oxide/Si interface characterization)
MRS-Workshop. September 11, 2001-September 12, 2001.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-18 02:24:16 +0900 Updated at: 2017-07-10 18:18:37 +0900