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Position Controlled GaN Nano-Structures Fabricated by Low Energy Focused Ion Beam System.
(低エネルギー集束イオンビーム装置を用いた配置制御されたGaNナノ構造の作製)

the 2003 MRS Fall Meeting. December 01, 2003-December 05, 2003.

NIMS author(s)


Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at: 2022-09-05 11:25:48 +0900 Updated at: 2022-09-05 11:25:48 +0900

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