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縦型立体構造デバイス実現に向けた半導体ナノワイヤの研究
(Development of semiconductor nanowires for the realization of vertical three-dimensional semiconductor devices)
第4回「革新的次世代デバイスを目指す材料とプロセス」領域会議. April 23, 2009-April 24, 2009. Invited
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 11:08:39 +0900 Updated at: 2024-03-05 11:42:28 +0900