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In-situ Observation of Focused Ion Beam Micropatterns on Semiconductors and Insulators
(集束イオンビームにより半導体及び絶縁体上に加工されたマイクロパタンのその場観察)
1998 International Microprocesses and Nanotechnology Conference . 1998-07-13.
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Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-18 01:30:10 +0900 Updated at: 2023-04-09 15:09:16 +0900