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(110)配向ScN薄膜の結晶性と電気特性の結晶方位依存性
(Crystallinity and Electrical Properties of (110)-oriented ScN Thin Films)
第86回応用物理学会秋季学術講演会. September 07, 2025-September 10, 2025.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2025-09-11 03:14:09 +0900 Updated at: 2025-09-11 03:14:09 +0900