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紫外レーザCVDにより作製したSiC膜の結晶性.
(Crystallization of SiC Film Prepared by UV Laser CVD.)
日本金属学会. October 01, 1991-October 03, 1991.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-18 00:22:35 +0900 Updated at: 2017-07-10 17:12:18 +0900