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PドープSiナノ細線中の欠陥の水素・酸素による不活性化とドナー濃度制御
(Passivation of defects and doping control in silicon nanowires by hydrogen and oxygen treatments)

松下聡, 深田 直樹, 鶴井隆雄, 内田紀行, 村上浩一.
2006年秋季第67回応用物理学会学術講演会. August 29, 2006-September 01, 2006.

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    Created at: 2017-02-14 11:45:51 +0900Updated at: 2017-07-10 19:39:24 +0900

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