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電子ビームのデポのリソグラフィーでシリコンのナノ構造
(Silicon nanostructures with quantum confinement by electron beam induced deposition lithography)
European Materials Research Society Meeting. June 07, 2010-June 11, 2010. Invited
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 10:53:57 +0900 Updated at: 2024-03-05 11:42:55 +0900