HOME > 口頭発表 > 書誌詳細Study of surface treatment process using VUV/O3 treatment for Au-Au bonding(VUV/O3照射プロセスを用いた低温大気圧金属電極接合技術)Jun Mizuno, Akiko Okada, Masatsugu Nimura, Naoko Unami, SHIGETOU, Akitsu, Hirokazu Noma, Katsuyuki Sakuma. ISAEM-2012 and AMDI3. 2012.NIMS著者重藤 暁津Materials Data Repository (MDR)上の本文・データセット作成時刻: 2017-02-14 11:14:53 +0900更新時刻: 2017-07-10 21:29:59 +0900