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三成分コンポージションスプレード誘電薄膜の高速成膜と評価
(Rapid Fabrication and Characterization of Three Component Composition Spread Dielectric Thin Films)
The 9th Intternational Workshop on Oxide Electronics. October 20, 2002-October 23, 2002.
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Created at: 2017-02-18 02:51:44 +0900 Updated at: 2017-07-10 18:31:39 +0900