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真空容器材の窒化ホウ素表面屈折による表面改質
(Surface Modification of Vacuum Chamber with Boron Nitride Segregation)
First Vacuum and Surface Sciences Conference of Asia and Austral. September 08, 1999-September 10, 1999.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 04:19:03 +0900 Updated at: 2017-07-10 17:58:16 +0900