HOME > Presentation > Detail
原子レベル精度のドーピングに向けた原子層堆積膜に埋め込まれた分子性酸化物
(Molecular Oxide Embedded in Atomic Layer Deposition Oxide towards Atomic-Level Precise Doping)
2013 JSAP-MRS Joint Symposia. September 16, 2013-September 20, 2013.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 11:01:06 +0900 Updated at: 2017-07-10 21:43:05 +0900