Development of a Bimodal Analysis Method Integrating 3D Atom Probe Tomography and HAADF-STEM Tomography Using Non-Rigid Registration for Trace Element Distribution Analysis in Semiconductors

Zentaro Akase, Taisei Bessho, Yuki Hino, Akito Mie, Kazunori Iwamitsu, Yugant Gotmare, Yoshito Otake, UZUHASHI, Jun, Hiroshi Nakajima, Jun Yamasaki, OHKUBO, Tadakatsu, Shigetaka Tomiya.

The 21st International Microscopy Congress 2026 (IMC21). 2026年08月31日-2026年09月04日.