HOME > Presentation > Detail
MBE法で作製したScN薄膜の非化学量論的組成と電気特性
(Non-stoichiometric Composition and Electric Properties of ScN Films Prepared by MBE)
2024年第71回応用物理学会春季学術講演会. March 22, 2024-March 25, 2024.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2024-03-28 09:53:39 +0900 Updated at: 2024-03-28 09:53:39 +0900