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Formation of Nano-crystalline SiC Films by Laser CVD at Low Temperatures
(低温レーザーCVDによるナノ結晶SiC膜の生成)
COEシンポジウム 第２回. February 19, 1997-February 21, 1997.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-18 01:12:03 +0900 Updated at: 2017-07-10 17:40:09 +0900