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Si (100)基板上へのWurtzite (11 0) AlNエピタキシャル薄膜の断面TEMによる構造解析
(Epitaxial wurtzite (11 0) AlN thin film on Si (100) substrates by TEM observation)
第63回応用物理学会学術講演会. September 24, 2002-September 27, 2002.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 10:55:34 +0900 Updated at: 2017-07-10 18:31:13 +0900