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低圧誘導結合VHFプラズマCVDによるナノ構造カーボンの合成
(Preparation of nanostructured carbon by low pressure inductively coupled VHF plasma)

岡田 勝行, 小松 正二郎, 松本 精一郎.
15th European Conference on Diamond, Diamond-like Materials, Car. September 12, 2004-September 17, 2004.

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    Created at: 2017-01-08 04:20:29 +0900 Updated at: 2017-07-10 19:03:58 +0900

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