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縦型立体構造デバイス実現に向けた半導体ナノワイヤの開発6
(Development of semiconductor nanowires for the realization of vertical three-dimensional semiconductor devices)
第6回革新的次世代デバイスを目指す材料とプロセス研究領域会議. April 16, 2010-April 18, 2010. Invited
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 04:28:59 +0900 Updated at: 2024-03-05 11:43:20 +0900