HOME > 口頭発表 > 書誌詳細Numerical Simulation of Low Pressure Inductively Coupled Plasma Sources for Nanostructured Carbon DepositionOKADA, Katsuyuki. The 12th International Symposium on Sputtering & Plasma Process. 2015.NIMS著者岡田 勝行Materials Data Repository (MDR)上の本文・データセット作成時刻 :2022-10-22 02:28:34 +0900 更新時刻 :2022-10-22 02:28:34 +0900