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Numerical Simulation of Low Pressure Inductively Coupled Plasma Sources for Nanostructured Carbon Deposition

The 12th International Symposium on Sputtering & Plasma Process. 2015.

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    作成時刻 :2022-10-22 02:28:34 +0900 更新時刻 :2022-10-22 02:28:34 +0900

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