Numerical Simulation of Low Pressure Inductively Coupled Plasma Sources for Nanostructured Carbon Deposition
| 著者 | OKADA, Katsuyuki. |
|---|---|
| 会議名 | The 12th International Symposium on Sputtering & Plasma Process |
| 発表年 | 2015 |
| 言語 | English |
| 著者 | OKADA, Katsuyuki. |
|---|---|
| 会議名 | The 12th International Symposium on Sputtering & Plasma Process |
| 発表年 | 2015 |
| 言語 | English |