HOME > Presentation > DetailDEVELOPMENT OF REMOTE-TYPE HYDROGEN RADICAL GENERATOR TO DECOMPOSE SiCl4 SOURCE IN ATMOSPHERIC PRESSURE角谷 正友, ダーマン ファティマ ゾーラ, 岡本 裕二, 堤 大耀, 鈴木義和, 鯉沼 秀臣. Tunisia-Japan Symposium. 2014.NIMS author(s)SUMIYA, MasatomoFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-02-14 11:30:32 +0900Updated at: 2018-06-05 13:43:19 +0900