HOME > Presentation > Detail
DEVELOPMENT OF REMOTE-TYPE HYDROGEN RADICAL GENERATOR TO DECOMPOSE SiCl4 SOURCE IN ATMOSPHERIC PRESSURE
Tunisia-Japan Symposium. November 28, 2014-November 30, 2014.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 11:30:32 +0900 Updated at: 2018-06-05 13:43:19 +0900