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同位体選択的赤外多光子解離されたフロロシランからの同位体濃縮 Si薄膜の作製
(Formation of isotope enriched Si films from isotopically selective infrared multi-photon decomposition of fluoro-silane)
第４９回真空に関する連合講演会. 2008.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 04:17:57 +0900Updated at: 2017-07-10 20:19:35 +0900