Reaction Mechanisms of the Atomic Layer Deposition of Indium Oxide Thin Films Using Ethylcycropentadienyl Indium
18th International Conference on Atomic Layer Deposition. 2018.
NIMS著者
Materials Data Repository (MDR)上の本文・データセット
作成時刻: 2018-02-20 22:07:43 +0900更新時刻: 2018-06-05 14:18:24 +0900