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Reaction Mechanisms of the Atomic Layer Deposition of Indium Oxide Thin Films Using Ethylcycropentadienyl Indium
18th International Conference on Atomic Layer Deposition. July 29, 2018-August 01, 2018.
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Created at: 2018-02-20 22:07:43 +0900 Updated at: 2018-06-05 14:18:24 +0900