HOME > Presentation > Detail形状記憶合金薄膜を用いたマイクロバルブとポンプの設計手法(Design of micro valves and pumps using shape memory alloy thin films )石田 章, 佐藤 守夫. 日本金属学会2006年秋期大会. September 16, 2006-September 18, 2006.NIMS author(s)ISHIDA, AkiraFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-01-08 05:44:12 +0900Updated at: 2017-07-10 19:39:10 +0900