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カンチレバーを用いた応力センシング
(The sensing of surface stresses by micro cantilever sensor)
第54回応用物理学関係連合講演会. 2007. Invited
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 03:39:59 +0900Updated at: 2024-03-05 11:41:29 +0900